基于对称硅光栅的窄带吸收器设计及其传感性能研究

Miao Pan, H. Huang, Wenzhi Chen, Shuai-Nan Li, Qin Xie, Feng Xu, Dongwei Wei, Jun Fang, Baodian Fan, L. Cai
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引用次数: 3

摘要

本文利用表面等离子体和Fabry-Perot (FP)腔,设计了对称硅光栅吸收体。采用时域有限差分法进行仿真计算。其基本单元结构是由二氧化硅、金属和硅组成的介电光栅。通过几何参数的调整,达到了对称硅光栅吸收器的最佳性能。在3000 ~ 5000nm光带产生一个吸收率大于99%的窄带吸收峰,吸收峰的波长为λ = 3750nm。物理吸收机制是硅光在入射光的作用下产生表面等离子体波,表面等离子体波与光的电磁场耦合引起表面等离子体共振,从而激发强烈的光响应调制。我们还探讨了几何参数和偏振角对硅光栅吸收器性能的影响。最后,我们系统地研究了这些结构的折射率灵敏度。这些结构可广泛应用于光滤波、光谱传感、气体检测等领域。
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Design of Narrow-Band Absorber Based on Symmetric Silicon Grating and Research on Its Sensing Performance
In this paper, using the surface plasmon and Fabry–Perot (FP) cavity, the design of a symmetric silicon grating absorber is proposed. The time-domain finite difference method is used for simulation calculations. The basic unit structure is a dielectric grating composed of silicon dioxide, metal and silicon. Through the adjustment of geometric parameters, we have achieved the best of the symmetric silicon grating absorber. A narrowband absorption peak with an absorption rate greater than 99% is generated in the 3000–5000 nm optical band, and the wavelength of the absorption peak is λ = 3750 nm. The physical absorption mechanism is that silicon light generates surface plasmon waves under the interaction with incident light, and the electromagnetic field coupling of surface plasmon waves and light causes surface plasmon resonance, thereby exciting strong light response modulation. We also explore the influence of geometric parameters and polarization angle on the performance of silicon grating absorbers. Finally, we systematically study the refractive index sensitivity of these structures. These structures can be widely used in optical filtering, spectral sensing, gas detection and other fields.
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