具有累积粗糙度的多层材料x射线反射率的简单封闭表达式

Scripta Metallurgica et Materialia Pub Date : 1995-12-01 DOI:10.1016/0956-716X(95)00391-8

David M. Kelly , Eric E. Fullerton , Jacobo Santa-Maria , Ivan K. Schuller

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引用次数: 23

摘要

我们给出了多层材料反射率的一个简单的封闭表达式，其中包括吸收、折射、表面和衬底反射的影响，但忽略了动态效应。这个表达式再现了精确的动力学计算，除了靠近临界角的区域和强烈的布拉格反射。该表达式被推广到包含遵循t12幂律增长的累积界面粗糙度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A simple closed-form expression for the X-ray reflectivity from multilayers with cumulative roughness

We present a simple closed-form expression for the reflectivity from a multilayer which includes the effects of absorption, refraction, surface and substrate reflections but neglects dynamical effects. This expression reproduces the exact dynamical calculation except for the regions near the critical angle and for intense Bragg reflections. The expression is generalized to include cumulative interface roughness which follows a $t^{12}$ power-law growth.

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Scripta Metallurgica et Materialia

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