{"title":"溶胶-凝胶制备的厚压电超声换能器在工业材料加工中的潜在应用","authors":"L. Zou, M. Sayer, C. Jen","doi":"10.1109/ULTSYM.1997.661751","DOIUrl":null,"url":null,"abstract":"Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO/sub 3/ films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO/sub 3/ particles in a PZT and LiNbO/sub 3/ sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO/sub 3/ films with 1 cm diameter and a thickness between 40-50 /spl mu/m.","PeriodicalId":6369,"journal":{"name":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","volume":"19 1","pages":"1007-1012 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":"{\"title\":\"Sol-gel fabricated thick piezoelectric ultrasonic transducers for potential applications in industrial material processes\",\"authors\":\"L. Zou, M. Sayer, C. Jen\",\"doi\":\"10.1109/ULTSYM.1997.661751\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO/sub 3/ films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO/sub 3/ particles in a PZT and LiNbO/sub 3/ sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO/sub 3/ films with 1 cm diameter and a thickness between 40-50 /spl mu/m.\",\"PeriodicalId\":6369,\"journal\":{\"name\":\"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)\",\"volume\":\"19 1\",\"pages\":\"1007-1012 vol.2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-10-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"16\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1997.661751\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1997.661751","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Sol-gel fabricated thick piezoelectric ultrasonic transducers for potential applications in industrial material processes
Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO/sub 3/ films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO/sub 3/ particles in a PZT and LiNbO/sub 3/ sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO/sub 3/ films with 1 cm diameter and a thickness between 40-50 /spl mu/m.
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