利用纳秒激光脉冲聚焦光纤微轴突制备多孔金属纳米粒子和微凸点

Alexander A. Kuchmizhak , Oleg B. Vitrik , Yuri N. Kulchin
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引用次数: 0

摘要

我们提出了一种新的光学元件:光纤微轴(FMA),用于激光辐射聚焦到具有贝塞尔样轮廓的衍射极限点,以及金属薄膜表面的精密激光纳米结构。利用开发的FMA对石英衬底上的Au/Pd金属膜进行单脉冲辐照,我们展示了亚微米中空微凸起的形成,每个凸起顶部都有一个小尖峰以及空心球形纳米颗粒。定义了这种微结构有序阵列的可控和可复制形成的实验条件。利用氩离子抛光和扫描电镜对制备的纳米颗粒和纳米疙瘩的内部结构进行了实验研究。这些方法揭示了激光诱导纳米颗粒和纳米疙瘩的多孔内部结构,这可能表明熔融金属膜的亚表面沸腾是决定这些结构形成过程的关键机制。
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Fabrication of porous metal nanoparticles and microbumps by means of nanosecond laser pulses focused through a fibre microaxicon

We present a novel optical element: a fibre microaxicon (FMA) for laser radiation focussing into a diffraction-limited spot with a Bessel-like profile as well as for precision laser nanostructuring of metal film surfaces. Using the developed FMA for single-pulse irradiation of Au/Pd metal films on a quartz substrate, we demonstrated the formation of submicron hollow microbumps, each with a small spike atop it as well as hollow spherical nanoparticles. The experimental conditions for the controllable and reproducible formation of ordered arrays of such microstructures were defined. The internal structure of the fabricated nanoparticles and nanobumps was experimentally studied using both argon-ion polishing and scanning electron microscopy. These methods revealed a porous inner structure of laser-induced nanoparticles and nanobumps, which presumably indicates that a subsurface boiling of the molten metal film is a key mechanism determining the formation process of such structures.

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