通过热退火和加入扩散势垒层改善电沉积p型Sb-Te薄膜热电性能

Tomomi Harada, Y. Sasaki, M. Okuhata, M. Takashiri
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摘要

采用热退火和在不锈钢衬底与Sb-Te薄膜之间加入扩散势垒层的方法研究了Sb-Te薄膜的热电性能。采用钼(Mo)和镍(Ni)薄膜作为扩散阻挡层。用扫描电镜观察了表面形貌,并用x射线衍射分析了晶体学特征。在室温下测量了平面内热电性能,包括电导率、塞贝克系数和功率因数。结果表明,有Mo层的Sb-Te薄膜比无扩散势垒层的Sb-Te薄膜具有更高的热电性能。这是因为来自衬底和Mo层本身的杂质原子没有扩散到Sb-Te层中。另一方面,由于Ni原子扩散到Sb-Te薄膜中,具有Ni层的Sb-Te薄膜表现出较低的热电性能。因此,Mo层的掺入有利于改善Sb-Te薄膜的热退火热电性能。
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Improvement in thermoelectric properties of electrodeposited p-type Sb-Te thin films by performing thermal annealing and incorporating diffusion barrier layers
We investigated the thermoelectric properties of electrodeposited Sb-Te thin films using thermal annealing and incorporating diffusion barrier layer between the stainless steel substrate and the Sb-Te thin film. Molybdenum (Mo) and nickel (Ni) films were used as a diffusion barrier layer. Surface morphology was observed by scanning electron microscope, and crystallographic characteristic was examined by X-ray diffraction analysis. In-plane thermoelectric properties, in terms of the electrical conductivity, Seebeck coefficient and power factor, were measured at room temperature. It was found that Sb-Te thin film with Mo layer exhibited higher thermoelectric performance compared to that of Sb-Te thin film with no diffusion barrier layer. This is because the impurity atoms from the substrate and Mo layer itself did not diffuse so much into Sb-Te layer. On the other hand, Sb-Te thin film with Ni layer exhibited the lower thermoelectric properties owing to the diffusion of Ni atoms into the Sb-Te thin film. Therefore, incorporation of Mo layer is beneficial to improve the thermoelectric properties of Sb-Te thin films by thermal annealing.
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