基于非晶Al2O3和W-Al2O3复合材料的高速溅射沉积太阳能涂层

Pub Date : 2023-02-06 DOI:10.3390/solar3010009
C. Diletto, A. D’Angelo, S. Esposito, Antonio Guglielmo, D. Mirabile Gattia, M. Lanchi
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引用次数: 0

摘要

在抛物面槽技术中,热稳定性和结构稳定性的太阳能涂层的开发对决定管式接收器的效率、耐久性和经济可行性起着关键作用。基于金属陶瓷的太阳能涂层通常由薄膜分层构成,其中多层梯度金属陶瓷放置在红外金属反射器和抗反射滤光片之间。本工作报道了通过对高沉积速率工艺的优化,在真空高温条件下,实现了具有高结构稳定性和化学稳定性的基于Al2O3和W的材料。采用反应磁控溅射法制备了高沉积速率的增反射层Al2O3材料。采用反应磁控共溅射工艺,制备了W-Al2O3基陶瓷材料作为吸收层。在真空(1 × 10−3 Pa)高温(620℃)退火前后,采用多种材料表征方法对所制备样品的稳定性进行了研究。利用拉曼光谱和XRD测量对样品的结构特性进行了评估,发现可以忽略不计的氧化物的存在会损害结构的稳定性。分光光度分析表明,沉积样品和退火样品之间变化不大,表明其结构稳定性高。
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Materials Based on Amorphous Al2O3 and Composite W-Al2O3 for Solar Coatings Deposited by High-Rate Sputter Processes
In parabolic trough technology, the development of thermally and structurally stable solar coatings plays a key role in determining the efficiency, durability, and economic feasibility of tube receivers. A cermet-based solar coating is typically constituted by a thin film stratification, where a multilayer graded cermet is placed between an infrared metallic reflector and an antireflection filter. This work reports the realization of materials based on Al2O3 and W characterized by high structural and chemical stability in vacuum at high temperature, obtained through the optimization of high-deposition-rate processes. Al2O3 material, employed as the antireflection layer, was deposited through a reactive magnetron sputtering process at a high deposition rate. Cermet materials based on W-Al2O3 were deposited and employed as absorber layers by implementing reactive magnetron co-sputtering processes. An investigation into the stability of the realized samples was carried out by means of several material characterization methods before and after the annealing process in vacuum (1 × 10−3 Pa) at high temperature (620 °C). The structural properties of the samples were evaluated using Raman spectroscopy and XRD measurements, revealing a negligible presence of oxides that can compromise the structural stability. Spectrophotometric analysis showed little variations between the deposited and annealed samples, clearly indicating the high structural stability.
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