III-V型固溶体异质lpe发生前,多组分液相和固相中间相共存

Yu.B. Bolkhovityanov
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引用次数: 13

摘要

III-V型固溶体的液相外延生长总是涉及多组分饱和或欠饱和液相与不处于热力学平衡的固相之间的接触,这要么是因为组分数量不同,要么是因为待生长层的组成与下层的组成不同。非平衡系统必须经过一些中间状态松弛到最终平衡状态。本综述的主要观点是表明,在异lpe中遇到的所有非平衡系统都经过以下弛豫阶段:固体的部分溶解,同时在固液界面(固体的亚表面区域)形成一个薄的扩散分隔层(0.5 - 3nm厚)(DDL)。该层包含了给定系统的所有组分,在某些情况下,可以通过实验观察到饱和多组分液体和固体扩散划分层之间的准平衡。如果DDL与衬底不匹配,则必须对前者进行应变。因此,固体的吉布斯势额外增加,液体必须通过额外溶解底物而变得过饱和。在固/液界面的某些点上,新相的中心成核和生长,而在同一界面的其他区域,固体同时溶解(“蚀回和再生长”的机制)。形成连续外延分隔层(EDL),将大块固体从多组分液体中分离出来。在这个阶段,系统分层成三层结构:多组分液体/EDL/衬底,进一步的松弛受到固态扩散的限制。只有在对选定的系统进行专门的实验时,才能以或多或少纯净的形式分别观察到阶段1至阶段3。通常,由于时间尺度的巨大变化和“快速”阶段2中事件的固有随机性,第一阶段和第二阶段几乎无法通过实验检测。因此,在实践中,松弛模式的不同组合被观察到。然而,在影响非平衡固/液界面弛豫模式的众多参数中,最关键的是液固两相的等温接触温度以及衬底与新固相之间的晶格失配。这不仅关系到不匹配的大小,也关系到它的符号。
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The co-existence of multi-component liquid and solid intermediate phases before the hetero-LPE of III–V solid solutions

Liquid phase epitaxial growth of III–V solid solutions invariably involves contact between the multi-component saturated or undersaturated liquid and solid phases which are not in thermodynamic equilibrium because either the number of components is different or the composition of the layer to be grown differs from the composition of the underlying layer. The non-equilibrium system must relax to the final equilibrium state through some intermediate ones.

The main point of the present review is to show that all non-equilibrium systems encounted in hetero-LPE come through the following stages of relaxation:

  • 1.

    1. Partial dissolution of the solid with simultaneous formation of a thin diffusive dividing layer (0.5–3 nm thick) (DDL) at the solid/liquid interface (in the subsurface region of the solid). The layer contains all the components of the given system and in some cases the quasi-equilibrium between the saturaed multi-component liquid and the solid diffusive dividing layer can be observed experimentally. If the DDL is mismatched to the substrate the former must be strained. So, the Gibbs potential of the solid increased additionally and the liquid must become supersaturated by additionally dissolving the substrate.

  • 2.

    2. The nucleation and the growth of centres of a new phase at some points on the solid/liquid interface with the simultaneous dissolution of the solid at other areas of the same interface (mechanism of “etch-back and regrowth”).

  • 3.

    3. The formation of a continuous epitaxial dividing layer (EDL), separating a bulk solid from a multi-component liquid. At this stage the system stratifies into a three-layer configuration: multi-component liquid/EDL/substrate, further relaxation is limited by a solid state diffusion.

It is only during dedicated experiments on selected systems that stages 1 to 3 can be observed separately in their more or less pure form. Usually, the first and the second stages almost escape experimental detection due to an enormous variability in time scales and an inherent randomness of events during the “fast” stage 2. So, in practice the varied combination of relaxation modes is observed. It is, however, true that, among many parameters which influence the mode of non-equilibrium solid/liquid interface relaxation, the most critical are the temperature of isothermal contact between liquid and solid phases and the lattice mismatch between a substrate and a new solid phase. This concerns not only the magnitude of the mismatch but its sign as well.

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Editorial Board Subject index Editorial Board Micromorphology of as-grown surfaces of crystals International School on Crystal Growth and Crystallographic Assessment of Industrial Materials
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