K. Koo, Hum Chung, Youngsuk Yu, Jong-mo Seo, Jaehong Park, Jung-Min Lim, S. Paik, A. Lee, Sungil Park, H. Choi, Myoung-Jun Jeong, D. Cho
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Fabrication of a novel 3D 8/spl times/8 electrode array for artificial retina
This paper presents a novel 3D 8/spl times/8 multi-electrode array for artificial retina application. Each electrode features a triangular pyramidal structure that composed of one (111) plane and two vertical planes. The coneangle between the (111) plane and the vertical plane is 19.5/spl deg/. The sharp triangular pyramidal structure makes the minimal invasive penetration for the inner limiting membrane. The characteristic measurement of impedance magnitude and the phase shift of a single electrode are 1.19 M/spl Omega/ and 80.8/spl deg/ at 1 kHz, respectively.