T. Hirano, U. Nakano, M. Ando, M. Goto, A. Sasaki, T. Okamoto, K. Azuma, U. Nakata
{"title":"用于等离子体激励的1米/sup 2/阶单层开槽波导阵列","authors":"T. Hirano, U. Nakano, M. Ando, M. Goto, A. Sasaki, T. Okamoto, K. Azuma, U. Nakata","doi":"10.1109/WCT.2003.1321559","DOIUrl":null,"url":null,"abstract":"A single-layer slotted waveguide array is proposed for 1m/sup 2/ plasma excitation at a microwave frequency (2.45 GHz). The electromagnetic field distribution over the aperture is measured with and without the quartz window attached. More accurate slot design will be conducted with the vacuum window, plasma chamber as well as the plasma taken into account.","PeriodicalId":6305,"journal":{"name":"2003 IEEE Topical Conference on Wireless Communication Technology","volume":"29 1","pages":"358-359"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"1m/sup 2/ order single-layer slotted waveguide arrays for plasma excitation\",\"authors\":\"T. Hirano, U. Nakano, M. Ando, M. Goto, A. Sasaki, T. Okamoto, K. Azuma, U. Nakata\",\"doi\":\"10.1109/WCT.2003.1321559\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A single-layer slotted waveguide array is proposed for 1m/sup 2/ plasma excitation at a microwave frequency (2.45 GHz). The electromagnetic field distribution over the aperture is measured with and without the quartz window attached. More accurate slot design will be conducted with the vacuum window, plasma chamber as well as the plasma taken into account.\",\"PeriodicalId\":6305,\"journal\":{\"name\":\"2003 IEEE Topical Conference on Wireless Communication Technology\",\"volume\":\"29 1\",\"pages\":\"358-359\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-10-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2003 IEEE Topical Conference on Wireless Communication Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/WCT.2003.1321559\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2003 IEEE Topical Conference on Wireless Communication Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WCT.2003.1321559","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
1m/sup 2/ order single-layer slotted waveguide arrays for plasma excitation
A single-layer slotted waveguide array is proposed for 1m/sup 2/ plasma excitation at a microwave frequency (2.45 GHz). The electromagnetic field distribution over the aperture is measured with and without the quartz window attached. More accurate slot design will be conducted with the vacuum window, plasma chamber as well as the plasma taken into account.
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