微电子器件环境试验箱的设计与制造

W. Graber, Aniket Chowdhury
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引用次数: 0

摘要

随着对微电子性能的进一步研究,测试方法也需要完善。一种测试方法,“加速老化”,将微电子器件暴露在高温和高湿度中,以收集和推断有关其寿命的数据,以更好地告知最终用户的期望,并可能有助于产生设备改进的想法。另一个重要的微电子可靠性问题是电迁移。电迁移可以在电子线路中产生空洞,导致电路中断或电气短路,破坏微电子。电迁移在更大的尺度上已经得到了很好的理解,但是当组件的尺度接近小于10纳米时,目前的理论变得不那么适用。
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The Design and Manufacturing of an Environmental Chamber to Test Microelectronic Devices
As further studies are undertaken to improve the capabilities of microelectronics, methods of testing need to be perfected as well. One method of testing, “accelerated aging,” exposes microelectronics to high temperatures and humidities to gather and extrapolate data about their lifespan, to better inform end user expectations and potentially help produce ideas for device improvement. Another microelectronic reliability issue of importance is electromigration. Electromigration can create voids in electronic traces, leading to interrupted circuits or electrical shorts, breaking microelectronics. Electromigration is well understood at larger scales, but as the scale of components approaches less than ten nanometers, current theory becomes less applicable.
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