利用扫描热显微镜(SThM)在纳米尺度上检测热导率和结构效应

M. Chirtoc, J. Gibkes, J. Antoniow, J. Henry, E. Neubauer, B. Bein, J. Pelzl
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引用次数: 6

摘要

本文用等效低通滤波器对扫描热显微镜(SThM)沃拉斯顿探头发出的3ω信号进行了理论描述。我们进行了导热系数k测量,横向分辨率约为100 nm。第一个应用是聚焦离子束注入的NiTi形状记忆合金微结构。将样品从室温加热到100℃,发现了局部马氏体到奥氏体的结构相变,3w信号变化幅度为-1.95%,相变化0.6°,热导率k增加3.5%。第二个应用是在直径为300 μm的裸金刚石晶体的平面上,以及在厚度为0.5-30 μm的Cr、Cu和Cu/Cr涂层上的点上进行局部k的静态测量。裸晶的高k值优势在包覆颗粒时就消失了,但是热障也取决于由这种粉末制成的材料中颗粒彼此接触时的特定构型。
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Sensing thermal conductivity and structural effects at the nanoscale by scanning thermal microscopy (SThM)
We introduce the theoretical description of 3ω signal from the Wollaston probe of a scanning thermal microscope (SThM) in terms of an equivalent low-pass filter. We performed thermal conductivity k measurements with lateral resolution of about 100 nm. The first application concerns NiTi shape memory alloys microstructured by focused ion beam implantation. Local martensite to austenite structural phase transition has been identified upon heating the sample from room temperature to 100°C The 3w signal changes were -1.95% in amplitude and 0.6° in phase, corresponding to thermal conductivity k increase of 3.5%. The second application consists of static measurement of local k on points situated on flat faces of bare diamond crystallites 300 μm in diameter, and on crystallites coated with Cr, Cu and Cu/Cr layers with thickness in the range 0.5-30 μm. The high k advantage of bare crystallites is lost upon coating the particles, but the thermal barrier depends also on the specific configuration when the particles are in contact to one another in materials obtained from such powders.
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