A membrane actuator based on piezo-polymer-composite technology [microvalve application example]

This paper presents the design, fabrication and characterization of a novel piezo-polymer-composite membrane actuator. Based on this membrane actuator, a valve for liquids and gases is presented as an application example. In measurements with water, the functionality of the valve was demonstrated for a pressure up to 650 hPa with a maximum flow of 1.5 l/h and a leak rate of less than 4 ml/h in the closed state. Moreover, a novel low-cost fabrication technology was developed that combines laser micromachining and polymer insert casting.