光流体无掩模光刻系统

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300446

S. Chung, W. Park, Hyunsung Park, Kyoungsik Yu, N. Park, Sunghoon Kwon

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引用次数: 7

摘要

我们提出并演示了一种在微流控通道中制造各种聚合物微粒和微线的光流无掩模光刻技术。结合无掩模光刻和微流体系统，我们展示了微流体通道中聚合物微结构生成的时空控制。

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Optofluidic Maskless Lithography System

We propose and demonstrate an optofluidic maskless lithography technique to fabricate various polymer microparticles and microwires in microfluidic channels. Combining maskless lithography and microfluidic systems, we demonstrate temporal and spatial control of polymeric micro structure generation in microfluidic channels.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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