{"title":"直接键合的非硅应用","authors":"Jan Haisma, Jan J.C. Groenen, Peter W. de Haas","doi":"10.1016/0165-5817(95)82008-6","DOIUrl":null,"url":null,"abstract":"<div><p>Four examples of direct bonding in non-silicon applications will be considered. Fusing, locally by laser scribing or integrally by annealing, gives an increased bond strength, since a chemical reaction or interdiffusion process takes place at the interface. Direct bonding of magnetic materials is a special case due to the contribution of magnetic forces to the bond strength. This process has been used to design an optimized axial-field motor. Direct bonding of an optical-fibre plate and a fluorescent-garnet substrate makes it possible to achieve an electron-microscopic detector with a high resolving power. A polymer direct-bonded to a superfinish-polished metal can be used in an x-ray reflector as a surface-protective element.</p></div>","PeriodicalId":101018,"journal":{"name":"Philips Journal of Research","volume":"49 1","pages":"Pages 151-163"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0165-5817(95)82008-6","citationCount":"4","resultStr":"{\"title\":\"Non-silicon applications of direct bonding\",\"authors\":\"Jan Haisma, Jan J.C. Groenen, Peter W. de Haas\",\"doi\":\"10.1016/0165-5817(95)82008-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Four examples of direct bonding in non-silicon applications will be considered. Fusing, locally by laser scribing or integrally by annealing, gives an increased bond strength, since a chemical reaction or interdiffusion process takes place at the interface. Direct bonding of magnetic materials is a special case due to the contribution of magnetic forces to the bond strength. This process has been used to design an optimized axial-field motor. Direct bonding of an optical-fibre plate and a fluorescent-garnet substrate makes it possible to achieve an electron-microscopic detector with a high resolving power. A polymer direct-bonded to a superfinish-polished metal can be used in an x-ray reflector as a surface-protective element.</p></div>\",\"PeriodicalId\":101018,\"journal\":{\"name\":\"Philips Journal of Research\",\"volume\":\"49 1\",\"pages\":\"Pages 151-163\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0165-5817(95)82008-6\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Philips Journal of Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0165581795820086\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Philips Journal of Research","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0165581795820086","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Four examples of direct bonding in non-silicon applications will be considered. Fusing, locally by laser scribing or integrally by annealing, gives an increased bond strength, since a chemical reaction or interdiffusion process takes place at the interface. Direct bonding of magnetic materials is a special case due to the contribution of magnetic forces to the bond strength. This process has been used to design an optimized axial-field motor. Direct bonding of an optical-fibre plate and a fluorescent-garnet substrate makes it possible to achieve an electron-microscopic detector with a high resolving power. A polymer direct-bonded to a superfinish-polished metal can be used in an x-ray reflector as a surface-protective element.