半导体和LCD晶圆厂不连续吊顶的地震振动控制

IF 1.2 4区 工程技术 Q3 CONSTRUCTION & BUILDING TECHNOLOGY Proceedings of the Institution of Civil Engineers-Structures and Buildings Pub Date : 2022-02-24 DOI:10.1680/jstbu.21.00153
Yung-Tsang Chen, Chien‐Liang Lee, William Soo Lon Wah, Mei-Yu Chen, Yen-Po Wang, Jui-Kun Chen, Hsing-Chih Yu
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引用次数: 0

摘要

在半导体和液晶显示(LCD)行业,吊顶广泛应用于晶圆厂和液晶面板厂。尽管采取了若干预防措施,但据报在过去的地震中造成了重大的经济损失,其中一个主要原因是由于地震期间天花板过度摇晃而造成天花板损坏或倒塌。本文提出了一种实用的方法,将定制的粘性阻尼器纳入吊顶,以减轻其地震反应。与大多数工厂的传统做法不同,在吊顶和结构楼板之间添加对角支撑杆以减轻天花板的振动,建议在天花板和柱/墙之间安装定制的粘性阻尼器。首先建立了一个模拟吊顶振动的解析模型,然后对吊顶结构模型进行了振动台试验,验证了所提方法的有效性和可行性。结果表明,安装粘性阻尼器后,吊顶的位移响应明显减小,在吊顶内加装支撑杆的阻尼器抗震性能最佳。
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Seismic vibration control of discontinuous suspended ceilings in semiconductor and LCD fabs
In semiconductor and liquid crystal display (LCD) industries, suspended ceilings are widely used in wafer and LCD panel fabs. Despite several preventive measures been taken, substantial financial loss was reported in the past earthquakes, and one of the main causes was attributed to damage or collapse of the ceilings due to excessive ceiling sway during earthquakes. This paper proposes a practical approach of incorporating customized viscous dampers into the suspended ceilings to mitigate their seismic response. Unlike conventionally been done in most fabs where diagonal bracing rods were added between suspended ceilings and structural floor slab to mitigate ceilings’ vibration, it is proposed to install customized viscous dampers in between the ceiling and the column/wall. An analytical model to simulate the vibration of a suspended ceiling is first developed, followed by shake table tests of the ceiling-structure model to verify the effectiveness and feasibility of the proposed approach. Results indicated that when equipped with the viscous dampers, the displacement responses of the suspended ceiling can be significantly reduced, and incorporating the dampers into the ceiling with added bracing rods is shown to give the best seismic performance.
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来源期刊
CiteScore
3.40
自引率
6.20%
发文量
61
审稿时长
12 months
期刊介绍: Structures and Buildings publishes peer-reviewed papers on the design and construction of civil engineering structures and the applied research associated with such activities. Topics include the design, strength, durability and behaviour of structural components and systems. Topics covered: energy conservation, people movement within and around buildings, strength and durability of steel and concrete structural components, and the behaviour of building and bridge components and systems
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