氩离子轰击RexSi1-x薄膜复合材料的XPS, SEM和AES研究

{"title":"氩离子轰击RexSi1-x薄膜复合材料的XPS, SEM和AES研究","authors":"R. Reiche, S. Oswald, H. Vinzelberg, C. Metz, J. Schumann, A. Heinrich, K. Wetzig","doi":"10.1007/S002160050420","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":12375,"journal":{"name":"Fresenius' Journal of Analytical Chemistry","volume":"19 1","pages":"329-332"},"PeriodicalIF":0.0000,"publicationDate":"1997-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Investigation of argon ion bombarded RexSi1-x thin film composites by XPS, SEM and AES\",\"authors\":\"R. Reiche, S. Oswald, H. Vinzelberg, C. Metz, J. Schumann, A. Heinrich, K. Wetzig\",\"doi\":\"10.1007/S002160050420\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":12375,\"journal\":{\"name\":\"Fresenius' Journal of Analytical Chemistry\",\"volume\":\"19 1\",\"pages\":\"329-332\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1997-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Fresenius' Journal of Analytical Chemistry\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/S002160050420\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fresenius' Journal of Analytical Chemistry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/S002160050420","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}