用于在非固定温度条件下工作的硫化氢的半导体金属氧化物传感器

A. Shaposhnik, A. A. Zviagin, O. V. Dyakonova, S. Ryabtsev, D. Ghareeb
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引用次数: 1

摘要

这项工作的目的是为硫化氢制造一种选择性气体传感器。在醋酸锌溶液中加入氨水,将所得的氢氧化锌离心后煅烧,可制得粒度为5 ~ 50 nm的多分散氧化锌粉体。用x射线相分析和透射电镜对材料进行了表征。随后,将硝酸银和萜酚加入到氧化锌纳米粉中形成糊状。气敏材料是通过将所得到的浆料涂在特殊的电介质衬底上并随后煅烧得到的,结果是萜酚燃烧殆尽,硝酸银变成氧化物(银的质量分数为3%)。传感器的工作选择了非固定温度模式,在此模式下,传感器快速加热到450°C(2秒)后,缓慢冷却到100°C(13秒)。在上一个循环结束后立即开始每一个总周期为15秒的后续加热-冷却循环。使用非定常温度模式,结合气敏层成分的选择,可以在硫化氢浓度为1ppm时获得200的响应。随着灵敏度的增加,选择性也显著增加。测定硫化氢和其他还原性气体(CO、NH3、H2)的交叉灵敏度均在3个数量级以上。因此,即使在存在干扰成分的情况下,该传感器也可用于检测硫化氢。与“电子鼻”设备相比,在定性和定量分析任务中使用高选择性传感器可以显着简化校准。基于高度选择性传感器的设备不需要使用数学方法来处理多维数据阵列。
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Semiconductor metal oxide sensor for hydrogen sulphide operating under non-stationary temperature conditions
The aim of the work was to create a selective gas sensor for hydrogen sulphide. As a result of adding ammonia to the zinc acetate solution, centrifuging the obtained zinc hydroxide and subsequent calcination, a polydisperse zinc oxide powder with a grain size of 5–50 nm was obtained. The material was characterized using X-ray phase analysis and transmission electron microscopy. Subsequently, silver nitrate and terpeniol were added to the zinc oxide nanopowder to form a paste. The gas-sensitive material was obtained by applying the resulting paste on a special dielectric substrate and subsequent calcination, as a result of which the terpeniol burned out, and the silver nitrate turned into an oxide (the mass fraction of the silver was 3%). A non-stationary temperature mode for the operation of the sensor was selected, in which, after rapidheating of the sensor to 450 °C (2 seconds), slow (13 seconds) cooling to 100 °C occurred. Each subsequent heating-cooling cycle with a total period of 15 seconds began immediately after the end of the previous cycle. The use of an unsteady temperature mode in combination with the selection of the composition of the gas-sensitive layer made it possible to obtain a response of 200 for a hydrogen sulphide concentration of 1 ppm. Along with an increase in sensitivity, a significant increase in selectivity was also observed. The cross-sensitivity for the determination of hydrogen sulphide and other reducing gases (CO, NH3, H2) was more than three orders of magnitude. Thus, this sensor can be used to detect hydrogen sulphide even in the presence of interfering components. The use of highly selective sensors in the tasks of qualitative andquantitative analysis can significantly simplify the calibration in comparison with “electronic nose” devices. Devices based on highly selective sensors do not require the use of mathematical methods for processing multidimensional data arrays.
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