利用由弯曲板波形成的倏逝声场的接近传感器

S. Hongo, I. Naliamura, N. Hosokawa
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引用次数: 2

摘要

提出了一种利用弯曲板波形成的倏逝声场的接近传感器。当物体进入倏逝场时,弯曲振动器的声辐射导纳会发生变化。因此,可以通过测量压电弯曲振动器的导纳来实现接近感测。为了验证该接近传感器的特性,利用140/spl度/旋转y形切割LiNbO/ sub3 /板和极化反转层组成的弯曲振动器进行了实验。当物体接近振动器主表面时,弯曲振动器的共振导纳随着物体与振动器距离的缩短而急剧减小。另一方面,当物体接近振动器尖端时,q因子在d>0.2 mm范围内下降,但在d<0.2 mm范围内又意外增加。
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Proximity sensors utilizing an evanescent acoustic field formed by flexural plate waves
A proximity sensor utilizing an evanescent acoustic field formed by flexural plate waves is proposed. When an object comes into the evanescent field, the acoustic radiation admittance of the bending vibrator may change. Hence, the proximity sensing can be achieved by measuring the electrical admittance of the piezoelectric flexural vibrator. To confirm the characteristics of the proximity sensor, some experiments were carried out using a flexural vibrator consisting of a 140/spl deg/ rotated Y-cut LiNbO/sub 3/ plate with a polarization-inverted layer. When an object was approached to the major surface of the vibrator, the admittance at a resonance of the bending vibrator decreased drastically according as the distance d between the object and the vibrator became short. On the other hand, when the object was approached to the tip of the vibrator, the Q-factor decreased in the range d>0.2 mm but increased again unexpectedly in the range d<0.2 mm.
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