用于菲索干涉测量的宽带可变透射球

3区 物理与天体物理 Q1 Materials Science Progress in Optics Pub Date : 2022-03-10 DOI:10.3390/opt3010011
Jonathan Koerber, G. Boreman, T. Suleski
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引用次数: 0

摘要

干涉测量中使用的透射球由f数和源波长指定。在本文中,我们探索了一种基于自由形状阿尔瓦雷斯透镜的宽带可变传输球(BVTS)系统,该系统可以在广泛的f数和波长范围内进行可变操作。潜在的应用和性能权衡讨论了比较,以传统的球形传输球。给出了菲索干涉仪从可见光到长波红外源的f/15到f/80配置的仿真结果。仿真结果表明,球面、彗差和像散对表面测量质量有一定的限制。
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Broadband Variable Transmission Sphere for Fizeau Interferometry
Transmission spheres used in interferometry are specified by f-number and source wavelength. In this paper, we explore a broadband variable transmission sphere (BVTS) system based on freeform Alvarez lenses that enables variable operation across a broad range of f-numbers and wavelengths. Potential applications and performance tradeoffs are discussed in comparison to conventional spherical transmission spheres. Simulation results are presented for f/15 to f/80 configurations from visible to long-wave infrared sources in a Fizeau interferometer. Simulation results highlight that spherical, coma, and astigmatism impose limits on surface measurement quality.
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来源期刊
Progress in Optics
Progress in Optics 物理-光学
CiteScore
4.50
自引率
0.00%
发文量
8
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