超高密度磁记录介质用CoCrPt/Cr和CoCrPt/Cr薄膜结构缺陷与磁性能的相关性

Pawel Glijer , Kyusik Sin , John M. Sivertsen , Jack H. Judy
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引用次数: 2

摘要

研究了高矫顽力CoCrPt/Cr和低矫顽力CoCrPtTa/Cr的显微组织。高矫顽力样品要么在高温下沉积,要么在高衬底偏压下沉积。在室温和低衬底偏压下沉积低矫顽力样品。结果表明,与低矫顽力样品相比,高矫顽力薄膜的平面断层数量明显增加。这些断层被认为是密集的层错,可能是由于薄膜在沉积过程中或刚沉积后的变形造成的,它们可能是由于晶体各向异性的局部变化而导致矫顽力升高的原因。在低矫顽力CoCrPt/Cr薄膜中,由于热应力或冲击应力引起的结构缺陷数量的增加与磁性能的深刻变化有关。
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Correlation of structural defects and magnetic properties in CoCrPt/Cr and CoCrTaPt/Cr thin films for ultra high density magnetic recording media

Microstructures of high and low coercivity CoCrPt/Cr and CoCrPtTa/Cr were examined. High-coercivity samples were deposited either at high temperatures or with high substrate bias. Low-coercivity samples were deposited at room temperature and at low substrate bias. It was demonstrated that high coercivity films had significantly increased amount of planar faults compared to low-coercivity samples. The faults were identified as densely spaced stacking faults which apparently resulted from the film deformation either during or just after film deposition and they might contribute to higher coercivity due to local changes in crystal anisotropy. An increase in the amount of structural defects by either thermal or impact stress was associated in low-coercivity CoCrPt/Cr films with a profound change of magnetic properties.

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