{"title":"离子辅助湿稳定氧化铪薄膜的沉积","authors":"D. Morton, Denton Vacuum, Traci R. Jensen","doi":"10.1364/OIC.2001.MB6","DOIUrl":null,"url":null,"abstract":"This paper reports the process parameters used to make moisture stable HfO2, the optical properties of HfO2 in the UV-visible spectral region and gives an example of a moisture stable thin-film coating of a HfO2/SiO2 LWP filter.","PeriodicalId":0,"journal":{"name":"","volume":" ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Ion assisted deposition of moisture stable hafnium oxide thin-films\",\"authors\":\"D. Morton, Denton Vacuum, Traci R. Jensen\",\"doi\":\"10.1364/OIC.2001.MB6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the process parameters used to make moisture stable HfO2, the optical properties of HfO2 in the UV-visible spectral region and gives an example of a moisture stable thin-film coating of a HfO2/SiO2 LWP filter.\",\"PeriodicalId\":0,\"journal\":{\"name\":\"\",\"volume\":\" \",\"pages\":\"0\"},\"PeriodicalIF\":0.0,\"publicationDate\":\"2001-07-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2001.MB6\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2001.MB6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ion assisted deposition of moisture stable hafnium oxide thin-films
This paper reports the process parameters used to make moisture stable HfO2, the optical properties of HfO2 in the UV-visible spectral region and gives an example of a moisture stable thin-film coating of a HfO2/SiO2 LWP filter.
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