2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Integration of Reflectometry into a FOUP for Improved Cycle Time

Pub Date : 2019-05-06 DOI: 10.1109/ASMC.2019.8791777 Árpád Jakab, J. Byrnes, László Makai, A. Engelsberg, A. Findlay, A. Vaid, Nicholas Pieniazek, J. Barker, Jeff Wood, Péter Rutka, P. Basa, Jack Downey

Evaluating Automated Guided Vehicle System Characteristics in Semiconductor Fab Automated Material Handling Systems

Pub Date : 2019-05-06 DOI: 10.1109/ASMC.2019.8791758 Karl-Benedikt Reith, P. Boden, Martin Däumler, S. Rank, T. Schmidt, Ralf Hupfer

Inline Inspection Improvement using Machine Learning on Broadband Plasma Inspector in an Advanced Foundry Fab

Pub Date : 2019-05-06 DOI: 10.1109/ASMC.2019.8791796 SM Guo, Jx Liu, R. Navalakhe, A. Lee, B. Tsai, Mahatma Lin, M. Plihal, Jianyun Zhou