Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - 最新文献

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Electrostatic impact-drive microactuator

Pub Date : 2001-03-16 DOI: 10.1109/MEMSYS.2001.906610 M. Mita, M. Arai, S. Tensaka, D. Kobayashi, P. Basset, A. Kaiser, P. Masquelier, L. Buchaillot, D. Collard, H. Fujita

Smart dust mote forerunners

Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906552 B. Warneke, B. Atwood, K. Pister

Modeling of capillary forces and binding sites for fluidic self-assembly

Pub Date : 2001-01-21 DOI: 10.1109/MEMSYS.2001.906555 K. Böhringer, U. Srinivasan, Roger T. Howe

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