M. Mita, M. Arai, S. Tensaka, D. Kobayashi, P. Basset, A. Kaiser, P. Masquelier, L. Buchaillot, D. Collard, H. Fujita
{"title":"Electrostatic impact-drive microactuator","authors":"M. Mita, M. Arai, S. Tensaka, D. Kobayashi, P. Basset, A. Kaiser, P. Masquelier, L. Buchaillot, D. Collard, H. Fujita","doi":"10.1109/MEMSYS.2001.906610","DOIUrl":null,"url":null,"abstract":"A fully packagable micromachined actuator was developed for generating precise but unlimited displacement. A suspended silicon mass is encapsulated between glass plates and driven by electrostatic force. By hitting a stopper, it generates impact force to drive the whole actuator in a small step (/spl sim/10 nm). It is a micromachined and electrostatic version of the impact-drive actuator.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"133 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"23","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2001.906610","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 23
Abstract
A fully packagable micromachined actuator was developed for generating precise but unlimited displacement. A suspended silicon mass is encapsulated between glass plates and driven by electrostatic force. By hitting a stopper, it generates impact force to drive the whole actuator in a small step (/spl sim/10 nm). It is a micromachined and electrostatic version of the impact-drive actuator.
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