1997 Proceedings Second Annual IEEE International Conference on Innovative Systems in Silicon

Programmable neural logic

Pub Date : 1998-11-01 DOI: 10.1109/ICISS.1997.630242 V. Bohossian, P. Hasler, Jehoshua Bruck

Microfluidic MEMS for semiconductor processing

Pub Date : 1998-11-01 DOI: 10.1109/ICISS.1997.630279 A. Henning, J. Firch, James M. Harris, E. B. Dehan, Bradford A. Cozad, L. Christel, Y. Fathi, D. Hopkins, L. Lilly, Wendell Mcculley, W. Weber, M. Zdeblick

Design and characterization of next-generation micromirrors fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

Pub Date : 1997-10-08 DOI: 10.1109/ICISS.1997.630255 M. Michalicek, J. Comtois, C. C. Barren