International Semiconductor Device Research Symposium, 2003

Optimizing pattern fill for planarity and parasitic capacitance

Pub Date : 2004-05-04 DOI: 10.1109/ISDRS.2003.1272167 M. Nelson, B. Williams, C. Belisle, S. Aytes, D. Beasterfield, J. Liu, S. Donaldson, J. Prasad

Improved crystallization temperature and interfacial properties of HfO/sub 2/ gate dielectrics by adding Ta/sub 2/O/sub 5/ with TaN metal gate

Pub Date : 2004-03-15 DOI: 10.1109/ISDRS.2003.1271996 Xiongfei Yu, Chunxiang Zhu, Qingchun Zhang, N. Wu, Hang Hu, M. F. Li, A. Chin, D. Chan, W. D. Wang, D. Kwong

Tunable CW-THz system with a log-periodic photoconductive emitter

Pub Date : 2004-03-15 DOI: 10.1109/ISDRS.2003.1272114 R. Mendis, C. Sydlo, J. Sigmund, M. Feiginov, P. Meissner, H. Hartnagel