2014 20th International Conference on Ion Implantation Technology (IIT)

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Implantation and metrology solutions for low energy boron implant on 450mm wafers

Pub Date : 2014-10-30 DOI: 10.1109/IIT.2014.6940018 A. Robbes, K.-A. Bui-T Meura, M. Moret, M. Schuhmacher, F. Torregrosa, G. Borvon

Increase of sp3 content in a-C films with gas cluster ion beam bombardments; XPS and NEXAFS study

Pub Date : 2014-10-30 DOI: 10.1109/IIT.2014.6939967 N. Toyoda, Asahi Kimura, I. Yamada

Damage engineered Se implant for NMOS TiSix contact resistivity reduction

Pub Date : 2014-10-30 DOI: 10.1109/IIT.2014.6939955 K. V. Rao, F. Khaja, C. Ni, S. Sharma, B. Zheng, J. Ramalingam, J. Gelatos, J. Lei, A. Mayur, R. Hung, V. Banthia, A. Brand, N. Variam

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