Unveiling the mechanism of remote epitaxy of crystalline semiconductors on 2D materials-coated substrates

IF 13.4 2区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Nano Convergence Pub Date : 2023-08-30 DOI:10.1186/s40580-023-00387-1

Xuejing Wang, Joonghoon Choi, Jinkyoung Yoo, Young Joon Hong

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Abstract

Remote epitaxy has opened novel opportunities for advanced manufacturing and heterogeneous integration of two-dimensional (2D) materials and conventional (3D) materials. The lattice transparency as the fundamental principle of remote epitaxy has been studied and challenged by recent observations defying the concept. Understanding remote epitaxy requires an integrated approach of theoretical modeling and experimental validation at multi-scales because the phenomenon includes remote interactions of atoms across an atomically thin material and a few van der Waals gaps. The roles of atomically thin 2D material for the nucleation and growth of a 3D material have not been integrated into a framework of remote epitaxy research. Here, we summarize studies of remote epitaxy mechanisms with a comparison to other epitaxy techniques. In the end, we suggest the crucial topics of remote epitaxy research for basic science and applications.

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揭示晶体半导体在二维材料涂层衬底上的远程外延机理。

远程外延为二维（2D）材料和传统（3D）材料的先进制造和异质集成开辟了新的机会。晶格透明度作为远程外延的基本原理已经被研究，最近的观测结果挑战了这一概念。理解远程外延需要多尺度的理论建模和实验验证的综合方法，因为这种现象包括原子在原子薄材料和几个范德华间隙之间的远程相互作用。原子薄2D材料在3D材料的成核和生长中的作用尚未整合到远程外延研究的框架中。在这里，我们总结了远程外延机制的研究，并与其他外延技术进行了比较。最后，我们提出了远程外延研究在基础科学和应用方面的重要课题。

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来源期刊

Nano Convergence Engineering-General Engineering

CiteScore

15.90

自引率

2.60%

发文量

审稿时长

13 weeks

期刊介绍： Nano Convergence is an internationally recognized, peer-reviewed, and interdisciplinary journal designed to foster effective communication among scientists spanning diverse research areas closely aligned with nanoscience and nanotechnology. Dedicated to encouraging the convergence of technologies across the nano- to microscopic scale, the journal aims to unveil novel scientific domains and cultivate fresh research prospects. Operating on a single-blind peer-review system, Nano Convergence ensures transparency in the review process, with reviewers cognizant of authors' names and affiliations while maintaining anonymity in the feedback provided to authors.