High laser damage threshold surface relief micro-structures for anti-reflection applications

D. S. Hobbs, B. MacLeod
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引用次数: 45

Abstract

Microstructures built into the surfaces of an optic or window, are an effective replacement for thin-film coatings in anti-reflection (AR) and narrow-band filter applications. AR microstructures exhibit particularly noteworthy performance where an average reflection loss of less than 0.2% over a four-octave range (400-1800nm) has been demonstrated, and a loss of less than 0.03% is routinely achieved for narrow-band applications. Because AR micro-textures provide a gradual change in the refractive index at a material boundary, it is expected that light can propagate through the boundary without material damage at energy levels that are much higher than that found with thin-film interference coatings. Recently, it was shown that the laser induced damage threshold (LIDT) of an inexpensive borosilicate glass window containing AR microstructures was nearly 57 J/cm2 at 1064nm (20ns pulse). This LIDT is two to three times greater than the damage threshold of single-layer sol-gel AR coatings on fused silica often reported in the literature. The development of surface relief AR textures for use in high-energy laser applications is presented. Data from scanning electron microscope (SEM) analysis, reflection measurements, and LIDT testing, is shown for high performance AR microstructures fabricated in fused silica, and borosilicate glass. Results of LIDT testing at wavelengths ranging from the near ultraviolet through the near infrared confirm the initial result that AR microstructures can operate at pulsed laser power levels at least two times higher than thin-film coatings. For near infrared applications such as laser weapons and fiber optic communications requiring high performance AR, LIDT levels for AR microstructures in fused silica are found to be at least five times greater than conventional multi-layer thin film coatings. An initial surface absorption test at 1064nm shows that AR microstructures may also exhibit improved lifetimes within continuous wave laser systems.
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用于抗反射应用的高激光损伤阈值表面浮雕微结构
内置在光学或窗口表面的微结构是增透(AR)和窄带滤光片应用中薄膜涂层的有效替代品。AR微结构表现出特别值得注意的性能,在四倍频程范围内(400-1800nm)的平均反射损耗小于0.2%,并且在窄带应用中通常达到小于0.03%的损耗。由于AR微纹理在材料边界处提供了折射率的渐变变化,因此预计光可以在比薄膜干涉涂层高得多的能级上传播而不会损坏材料。最近的研究表明,在1064nm (20ns脉冲)下,含有AR微结构的廉价硼硅酸盐玻璃窗的激光诱导损伤阈值(LIDT)接近57 J/cm2。该LIDT比文献中经常报道的熔融二氧化硅单层溶胶-凝胶AR涂层的损伤阈值大两到三倍。介绍了用于高能激光应用的表面浮雕AR纹理的发展。从扫描电子显微镜(SEM)分析,反射测量和LIDT测试的数据,显示了在熔融二氧化硅和硼硅酸盐玻璃中制造的高性能AR微结构。从近紫外到近红外波长范围内的LIDT测试结果证实了初始结果,即AR微结构可以在脉冲激光功率水平至少比薄膜涂层高两倍的情况下工作。对于需要高性能AR的近红外应用,如激光武器和光纤通信,熔融二氧化硅中AR微结构的LIDT水平至少是传统多层薄膜涂层的五倍。在1064nm的初始表面吸收测试表明,在连续波激光系统中,AR微结构也可能表现出改善的寿命。
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