{"title":"Состав Ti/Si и Co/Si-структур, сформированных ионно-ассистируемым осаждением","authors":"Валентин Валентинович Тульев","doi":"10.52065/2520-6141-2022-260-2-60-64","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":286809,"journal":{"name":"Труды БГТУ Серия 3","volume":"14 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Труды БГТУ Серия 3","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.52065/2520-6141-2022-260-2-60-64","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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