{"title":"A Design of 4-bit \"Distributed drive\" MEMS Phase Shifters","authors":"Jianzhong Lou, Zhuo Xu, Miao Lu, Xiaodong Hu, Zhengping Zhao, Yang Ruixia","doi":"10.1109/ICMMT.2007.381473","DOIUrl":null,"url":null,"abstract":"An idea of \"distributed drive\" MEMS phase shifter is first proposed in this dissertation. The minimum phase shift bit act as elementary cell. The multi-bits phase shifter is consist of dozens of series cell. The phase shift is increased by sequence change phase shift of cell. It decrease the reflection plane from 0-3 to 0-1 for 4 bit phase shifter, further decrease the return loss and insertion loss. In this paper, the full wave electromagnetic simulation of the 22.5deg phase shift cell is done by HFSS. A 4-bit DMTL phase shifter that cascaded by 15 cell is simulated by ADS. The maximal return loss is -11 dB for \"distributed drive\", and - 7.5dB for conventionality from DC to 32 GHz. The insertion loss is better than -3 dB from DC to 32 GHz for \"distributed drive\". The insertion loss is -3.5 dB at 16 GHz for conventionality.","PeriodicalId":409971,"journal":{"name":"2007 International Conference on Microwave and Millimeter Wave Technology","volume":"9 Suppl 11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Conference on Microwave and Millimeter Wave Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMMT.2007.381473","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
An idea of "distributed drive" MEMS phase shifter is first proposed in this dissertation. The minimum phase shift bit act as elementary cell. The multi-bits phase shifter is consist of dozens of series cell. The phase shift is increased by sequence change phase shift of cell. It decrease the reflection plane from 0-3 to 0-1 for 4 bit phase shifter, further decrease the return loss and insertion loss. In this paper, the full wave electromagnetic simulation of the 22.5deg phase shift cell is done by HFSS. A 4-bit DMTL phase shifter that cascaded by 15 cell is simulated by ADS. The maximal return loss is -11 dB for "distributed drive", and - 7.5dB for conventionality from DC to 32 GHz. The insertion loss is better than -3 dB from DC to 32 GHz for "distributed drive". The insertion loss is -3.5 dB at 16 GHz for conventionality.
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