A Design of 4-bit "Distributed drive" MEMS Phase Shifters

Jianzhong Lou, Zhuo Xu, Miao Lu, Xiaodong Hu, Zhengping Zhao, Yang Ruixia
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Abstract

An idea of "distributed drive" MEMS phase shifter is first proposed in this dissertation. The minimum phase shift bit act as elementary cell. The multi-bits phase shifter is consist of dozens of series cell. The phase shift is increased by sequence change phase shift of cell. It decrease the reflection plane from 0-3 to 0-1 for 4 bit phase shifter, further decrease the return loss and insertion loss. In this paper, the full wave electromagnetic simulation of the 22.5deg phase shift cell is done by HFSS. A 4-bit DMTL phase shifter that cascaded by 15 cell is simulated by ADS. The maximal return loss is -11 dB for "distributed drive", and - 7.5dB for conventionality from DC to 32 GHz. The insertion loss is better than -3 dB from DC to 32 GHz for "distributed drive". The insertion loss is -3.5 dB at 16 GHz for conventionality.
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4位“分布式驱动”MEMS移相器的设计
本文首次提出了“分布式驱动”MEMS移相器的思想。最小相移位作为基本单元。多比特移相器由数十个串联单元组成。细胞的相移随序列变化而增大。将4位移相器的反射平面从0-3减小到0-1,进一步降低了回波损耗和插入损耗。本文利用HFSS对22.5°相移电池进行了全波电磁仿真。采用ADS仿真了15个单元级联的4位DMTL移相器。在“分布式驱动”下,最大回波损耗为-11 dB,在直流至32 GHz的常规范围内,最大回波损耗为- 7.5dB。对于“分布式驱动”,从直流到32 GHz的插入损耗优于-3 dB。在16ghz时,插入损耗为-3.5 dB。
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