{"title":"Measurement of resonant microbeam pressure sensors","authors":"Deyong Chen, D. Cui","doi":"10.1109/ICIA.2004.1373357","DOIUrl":null,"url":null,"abstract":"Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors' output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.","PeriodicalId":297178,"journal":{"name":"International Conference on Information Acquisition, 2004. Proceedings.","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Information Acquisition, 2004. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIA.2004.1373357","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Operation and measurement of an electro-thermally excited resonant pressure sensor are described. An open-loop measuring system with lock-in amplification technology is established to assess the characteristics of the beam resonator and in order to solve the problem of detecting dynamic relationships between various sensors' output frequency and their applied conditions, a close-loop data-acquisition system is developed and the gage factor, temperature sensitivity and frequency stability are measured with the system.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
