Mechanical loading effect of rectangularly-shaped shallow electrodes on SAW devices

Abstract

We present a perturbation analysis of mechanical loading effect for rectangularly-shaped shallow electrodes on SAW devices. The model utilized assumes on the plane surface of a piezoelectric semi-space a layer of thickness d with piecewise constant material constitution. The method relies on eigenequations of the form L/spl psi//spl I.oarr/=/spl part//sub z//spl psi//spl I.oarr/. Our analysis technique provides a convenient perturbative solution of this equation in the substrate and layer regions subject to certain interface and boundary conditions. We validate our theory by calculating the dispersion curves related to waves propagating along corrugated surfaces.