A. Galuza, V. K. Kiseliov, I. Kolenov, Y. Kuleshov, S.V. Mizrakhy, S.Yu. Serebryanskiy
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引用次数: 0
Abstract
Ellipsometry is a set of noncontact and nondestructive experimental techniques for studying physical properties and structural parameters of various materials and systems [1-3]. Ellipsometry is based on the phenomena of radiation polarization state change at reflecting from a surface. At present, extension of the probing radiation frequency-range is one of the major development lines of ellipsometric experimental technique. Each spectral interval requires specific elements and design though general configuration remains the same.
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