MEMS-based particle size magnifier for measuring ultra low nanoparticle concentration

Abstract

This paper firstly reports a MEMS-based particle size magnifier. By growing nanoparticles to a diameter greater than 1 μm, the proposed device enables optical methods to detect the individual nanoparticles which cannot be seen optically due to their small size. The proposed device shows the potential of realizing a compact and low cost nanoparticle sensor which can measure ultra-low nanoparticle concentration, while the recent MEMS-based particle sensors are only applicable for high particle concentration environment.