Development of no fluctuation by PZT of course approaching mechanism on AFM/FFM

Abstract

This reports the development of no fluctuation by PZT of course approaching mechanism (Inchworm) on AFM/FFM (atomic force microscope/frictional force microscope), where the course approaching mechanism of the sample (work) or probe (processing edge) is discussed. On the conventional inchworm the electric noise which is amplified at PZT actuator at fixing position of course approaching mechanism. On the other hand, the mechanism which is proposed here does not influenced by the electric noise at fixing position. In practice, by implementing the spring element of frame of inchworm parallel to the PZT actuator, with no applying the electric voltage, which corresponds the shrinking manner the fixing the sample (work) or probe (processing edge) is realized. The motion distance of one step is desired to be 1nm, which is changed by max. 1/10 by changing the voltage applying the PZT actuator