Design of MEMS gyroscope mounting error calibration platform based on optical traceability

International Conference on Optoelectronic Information and Computer Engineering (OICE) Pub Date : 2023-08-01 DOI:10.1117/12.2691206

Renpu Li, Juan Yan, Tao Feng, Yujia Huo, Lei Liu

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Abstract

A microelectromechanical system (MEMS) gyroscope mounting error calibration platform composed of autocollimator and manual turntable were proposed. In order to achieve the dynamic angular range reflected in the mounting error of MEMS gyroscope, the range of the NIKON-6D autocollimator has been extended from ±15' to ±9°by exploiting the relationship between the angular range and the structure of the reflector. In addition, in the software design, a common data acquisition serial port between CMOS camera and MEMS gyroscope was built. By integrating the angular rate measurements of the MEMS gyroscope with the sampling time, a uniformity of magnitude was obtained between the angular readings of the autocollimator and the angular rate readings of the MEMS gyroscope. Experimental verification shows that compared with precision three-axis angular rate output turntable, the relative calibration deviation of the MEMS gyroscope mounting error coefficient is less than 0.6%, and the platform benefits from the traceable reference of the autocollimator, which has the advantages of low maintenance evaluation rate and high stability, and can serve the long-cycle and high-efficiency MEMS gyroscope mounting error calibration and calibration process.

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基于光溯源的MEMS陀螺仪安装误差标定平台设计

提出了一种由自准直仪和手动转台组成的微机电系统(MEMS)陀螺仪安装误差标定平台。为了实现反映在MEMS陀螺仪安装误差中的动态角度范围，利用角度范围与反射镜结构之间的关系，将NIKON-6D自准直仪的范围从±15°扩展到±9°。此外，在软件设计中，建立了CMOS相机与MEMS陀螺仪之间的通用数据采集串口。将MEMS陀螺仪的角速率测量值与采样时间进行积分，得到了自准直仪的角速率读数与MEMS陀螺仪的角速率读数在量级上的均匀性。实验验证表明，与精密三轴角速率输出转台相比，该平台的MEMS陀螺仪安装误差系数相对校准偏差小于0.6%，且得益于自准直器的可追溯参考，具有维护评估率低、稳定性高的优点，可服务于长周期、高效率的MEMS陀螺仪安装误差校准和校准过程。

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International Conference on Optoelectronic Information and Computer Engineering (OICE)

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