Youmin Wang, Guangya Zhou, Kyoungsik Yu, Ming C. Wu
{"title":"Large-scale MEMS-actuated 2-D optical phased arrays","authors":"Youmin Wang, Guangya Zhou, Kyoungsik Yu, Ming C. Wu","doi":"10.1109/MEMSYS.2018.8346471","DOIUrl":null,"url":null,"abstract":"We report on a novel two-dimensional (2-D) optical phased arrays with 25,600 addressable phase shifters made of diffraction gratings with in-plane movement. The phase shift is independent of wavelength, and only depends on the displacement of the grating. The large optical aperture 3.2×3.1mm<sup>2</sup> produces a narrow beam (0.028°×0.029°) steerable over a field-of-view of 4.4°×4.6° at 1550nm wavelength, with a maximum response time of 4.2μs.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2018.8346471","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We report on a novel two-dimensional (2-D) optical phased arrays with 25,600 addressable phase shifters made of diffraction gratings with in-plane movement. The phase shift is independent of wavelength, and only depends on the displacement of the grating. The large optical aperture 3.2×3.1mm2 produces a narrow beam (0.028°×0.029°) steerable over a field-of-view of 4.4°×4.6° at 1550nm wavelength, with a maximum response time of 4.2μs.
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