A vision system for inspection of ball bonds in integrated circuits

A. Khotanzad, H. Banerjee, M. Srinath
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引用次数: 6

Abstract

The paper describes a vision system for automatic inspection of the connecting part of the wire bond of an IC where the wire connects to the bond pad on the chip. It considers a popular type of such bonds known as 'ball bond'. Using two-dimensional images taken from the top of the IC wafer, the system determines several geometric measures which are important in determining the quality of the bond. These measures include the boundary, length of major and minor axes of the best fitting ellipse and the center. The process utilizes automatic thresholding, morphological operations and geometric moments of the image. Success of the method is demonstrated through experimental studies on actual bonds.<>
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一种用于检测集成电路中球键的视觉系统
本文介绍了一种用于自动检测集成电路线键连接部分的视觉系统,其中线键连接到芯片上的键合盘。它考虑了一种被称为“球形债券”的流行债券类型。利用从IC晶圆顶部拍摄的二维图像,该系统确定了几个几何指标,这些指标对确定键合质量很重要。这些措施包括边界、最佳拟合椭圆和中心的长、短轴长度。该方法利用图像的自动阈值分割、形态学运算和几何矩。通过对实际键的实验研究,证明了该方法的有效性。
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