Structured piezo-ceramic mechatronic handling devices for micro and nano manipulations

Abstract

This paper presents the development of a methodology and technology for the appropriate selection and creation of mechatronic handling devices (MHD) able to accomplish certain micro- and/or nano-operation task. As basis actuator, piezo ceramic structures integrated into the mechatronic device are utilized and developed here. Two applications, in bioscience and electrochemistry are foreseen for a demonstration phase. Specific multilayer design approach of piezo-actuated mechatronic handling devices for micro- and nano-operations was proposed based on the method for piezo structures synthesis. Comparison study of the developed mechatronic handling device prototypes is performed based on the obtained simulation and experimental results. Teleoperated control approach is developed based on the impedance scaling technique.