Identification of Shallow Acceptors in Epitaxial GaN:Si

N. S. Korzhavina, T. Shamirzaev, C.S. Zhuravlev, V. Mansurov, A.U. Nikitin, A. Toropov
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Abstract

Shallow acceptors in doping epitaxial layers GaN:Si has been studied. A doping concentration was specified by temperature of Si-dopant source (TSi). The chemical nature of the acceptors has been determinated by photoluminescence (PL) method. It is shown that a dominant acceptors in GaN:Si are background impurity Mg at TSi <1350degC and Si on N state at TSi =1400degC.
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外延GaN:Si中浅层受体的鉴定
研究了氮化镓外延层中的浅层受体。通过硅掺杂源温度(TSi)确定掺杂浓度。用光致发光(PL)法测定了受体的化学性质。结果表明,GaN:Si的主要受体是背景杂质Mg (TSi <1350℃)和Si on N (TSi =1400℃)。
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