Investigation on performance of piezoelectric beam based MEMS actuator for focussing of micro lens in mobile application

Abstract

Photo capturing capabilities are one of the core functions in mobile devices which makes the people to use very often. But the cost of the mobile depends on the high quality design and low cost mass production of micro optical lens systems. This is achieved by designing a suitable actuator which leads to the precise focussing of a subject in mobile camera. In this paper, MEMS based Piezoelectric cantilever beam actuator is proposed and designed with different type of piezo material, beam length to width ratio, number of layers and number of beams to achieve optimum focussing and tracking. The investigation reveals that rectangular shape with lead zirconate titanate as piezo material yields the maximum displacement of 4.17989pm The 1:2 actuator length to beam length ratio andfive layer beam improve the maximum displacement. This analysis is performed using Intellisuite MEMS CAD Tool in TEM analysis.