{"title":"A process design course utilizing micromechanical devices","authors":"M. Lu, M. Schmidt","doi":"10.1109/UGIM.1991.148122","DOIUrl":null,"url":null,"abstract":"Describes a course which is being developed at MIT aimed at incorporation of experimental microfabrication process design at the undergraduate level. They discuss the philosophy and organization of this course and explain how it has been implemented using micromechanical structures as the test vehicle. In particular, a silicon pressure sensor was successfully fabricated by a team of four students in one semester, and was tested and demonstrated to measure pressures in the range of 0-5 psi.<<ETX>>","PeriodicalId":163406,"journal":{"name":"Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.1991.148122","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Describes a course which is being developed at MIT aimed at incorporation of experimental microfabrication process design at the undergraduate level. They discuss the philosophy and organization of this course and explain how it has been implemented using micromechanical structures as the test vehicle. In particular, a silicon pressure sensor was successfully fabricated by a team of four students in one semester, and was tested and demonstrated to measure pressures in the range of 0-5 psi.<>
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