{"title":"Photothermal Probe-Beam Deflection Measurement of Moisture Adsorption on a Silicon Surface Under Atmospheric Conditions","authors":"Holger Schroeder, A. Tam","doi":"10.1364/lmd.1987.tha3","DOIUrl":null,"url":null,"abstract":"Although there is much work done on thermal desorption of molecules on a solid surface /1/, most previous work was performed in vacuum or low-pressure conditions and utilized direct particle detectors (e.g. mass spectrometer). The present work examines photo-thermal desorption from a surface in atmospheric conditions utilizing a probe-beam deflection /2/ technique. This is demonstrated for an important case of adsorbed water on a silicon wafer with normal surface oxide.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Topical Meeting on Lasers in Materials Diagnostics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/lmd.1987.tha3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Although there is much work done on thermal desorption of molecules on a solid surface /1/, most previous work was performed in vacuum or low-pressure conditions and utilized direct particle detectors (e.g. mass spectrometer). The present work examines photo-thermal desorption from a surface in atmospheric conditions utilizing a probe-beam deflection /2/ technique. This is demonstrated for an important case of adsorbed water on a silicon wafer with normal surface oxide.
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