Degradation Behavior and Mechanisms of E-mode GaN HEMTs with p-GaN Gate under High Temperature Gate Bias Stress

WenYang Chen, Y.Q. Chen, K. Geng
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Abstract

In this work, the degradation behavior and the physical mechanism of the AlGaN/GaN HEMTs with p-GaN gate after HTGB stress were investigated. The experiment results show that the threshold voltage ($V_{th})$ and gate leakage currents (Igss) increase obviously. At the same time, the drain-source current (Ids) decreases significantly after HTGB stress. However, the on-state resistance (Ron) and the blocking characteristics have no change. Furthermore, obvious decrease was observed in the $C_{g}-V_{g}$ curve, and it shows that the interface state increases significantly after HTGB stress. The physical mechanism of the degradation behavior could be attributed to electromigration and the formation of new traps at p-GaN layer, AlGaN barrier, p-GaN/AlGaN interface, and AlGaN/GaN interface. This work could be a useful reference for the study of AlGaN/GaN HEMTs.
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高温栅偏置应力下p-GaN栅极e模GaN hemt的降解行为及机理
本文研究了HTGB应力作用下带p-GaN栅极的AlGaN/GaN hemt的降解行为及其物理机制。实验结果表明,阈值电压($V_{th})和栅漏电流(Igss)明显增大。同时,HTGB应力后漏源电流(Ids)显著减小。然而,导通态电阻(Ron)和阻塞特性没有变化。此外,$C_{g}-V_{g}$曲线明显减小,说明HTGB应力作用后界面状态显著升高。降解行为的物理机制可归因于电迁移和p-GaN层、AlGaN势垒、p-GaN/AlGaN界面和AlGaN/GaN界面上新陷阱的形成。本研究为AlGaN/GaN hemt的研究提供了有益的参考。
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