Design and Optimization of FBAR Filter Using Acoustic-Electromagnetic Coupling Model and MBVD Model

2020 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) Pub Date : 2020-12-07 DOI:10.1109/NEMO49486.2020.9343531

Shitao Chen, Qiupeng Yin, Cong Hu, Zhixiang Huang

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引用次数: 1

Abstract

In this paper, the acoustic-electromagnetic coupling model and modified Butterworth Van-Dyke (MBVD) model are combined to design and optimize a 2.07GHz film bulk acoustic resonator (FBAR) filter. The 3 dB bandwidth of the FBAR filter is 0.08 GHz, from 2.03 GHz to 2.11 GHz. The maximum ripple is -0.45 dB in the pass-band and two transmission zeros have been introduced at 2 GHz and 2.15 GHz, so the out of band suppression of the filter is improved. The MBVD model and acoustic-electromagnetic coupling model are implemented by commercial software ADS and COMSOL, respectively. The correlated optimization parameters of these two models are built by the computational formula of static capacitance. Finally, the optimization parameters of MBVD model are brought into the acoustic-electromagnetic coupling model. The accuracy of the final optimization parameters is verified by the comparison of these two models. The proposed optimization method is more efficiency than direct optimization in COMSOL.

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基于声电磁耦合模型和MBVD模型的FBAR滤波器设计与优化

本文将声电磁耦合模型与改进的Butterworth Van-Dyke (MBVD)模型相结合，设计并优化了2.07GHz薄膜体声谐振器(FBAR)滤波器。FBAR滤波器的3db带宽为0.08 GHz，从2.03 GHz到2.11 GHz。最大纹波在通带为-0.45 dB，在2 GHz和2.15 GHz处引入两个传输零点，提高了滤波器的带外抑制能力。MBVD模型和声电磁耦合模型分别由商业软件ADS和COMSOL实现。根据静态电容计算公式，建立了两种模型的相关优化参数。最后，将MBVD模型的优化参数引入到声电磁耦合模型中。通过两种模型的比较，验证了最终优化参数的准确性。所提出的优化方法比COMSOL中的直接优化方法效率更高。

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2020 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO)

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