{"title":"Hot-spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter","authors":"Masoud Babaeian, E. Mason, Jue Wang, G. Cox","doi":"10.1117/12.2641982","DOIUrl":null,"url":null,"abstract":"We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.","PeriodicalId":202227,"journal":{"name":"Laser Damage","volume":"134 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Damage","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2641982","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.
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