{"title":"A model of a 300mm wafer fabrication line","authors":"P. Campbell, D. Rohan, E. MacNair","doi":"10.1145/324138.324554","DOIUrl":null,"url":null,"abstract":"Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300mm wafer fabrication line that we are using to make strategic decisions related to the factory.","PeriodicalId":287132,"journal":{"name":"Online World Conference on Soft Computing in Industrial Applications","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Online World Conference on Soft Computing in Industrial Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1145/324138.324554","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10
Abstract
Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300mm wafer fabrication line that we are using to make strategic decisions related to the factory.
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