{"title":"Assembly and characterization of optical MEMS (micro-electro-mechanical systems)","authors":"D. Khalil, A. H. Morshed","doi":"10.1109/PAIA.2002.995083","DOIUrl":null,"url":null,"abstract":"In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachining (oxidation, photolithography and wet etching) are developed in the Laser lab at the faculty of Engineering, Ain Shams University. For the characterization purpose, an automated set-up for the spot size and misalignment loss measurements are developed.","PeriodicalId":287031,"journal":{"name":"Third Workshop on Photonics and its Application at Egyptian Engineering Faculties and Institutes (Cat. No.02EX509)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Third Workshop on Photonics and its Application at Egyptian Engineering Faculties and Institutes (Cat. No.02EX509)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PAIA.2002.995083","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachining (oxidation, photolithography and wet etching) are developed in the Laser lab at the faculty of Engineering, Ain Shams University. For the characterization purpose, an automated set-up for the spot size and misalignment loss measurements are developed.
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