The Analysis of Surface Acoustic Waves in A Finite Solid with Electrodes by the Rayleigh-Ritz Method

Jinghui Wu, Longtao Xie, A. Zhang, Jianke Du, K. Hashimoto, Ji Wang
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Abstract

The analysis of surface acoustic waves (SAW) in finite solids with complications such as electrodes is of great importance in resonator design. As a simplification of the analysis of actual SAW resonators, we apply the Rayleigh-Ritz method to an isotropic substrate for the formulation and numerical analysis of effects of electrodes on the wave velocity and frequency spectra.It is shown that accurate results of frequency of Rayleigh waves can be obtained at reasonable costs in the computation of eigenvalues from the dense stiffness and mass matrices. As it is known, the computational time are spread to the numerical integration of elements of matrices and the extraction of eigenvalues of the generalized eigenvalue problem, although the size of matrices is small but the matrices are dense, which is in contrast with the FEM approach.The Rayleigh-Ritz method provides another effective technique in the analysis with possible development of efficient tools for the design of SAW resonators.
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有限电极固体表面声波的瑞利-里兹法分析
具有电极等复杂结构的有限固体表面声波的分析在谐振器设计中具有重要意义。作为对实际声表面波谐振器分析的简化,我们将瑞利-里兹方法应用于各向同性衬底,对电极对波速和频谱的影响进行了公式和数值分析。结果表明,利用密集刚度和质量矩阵计算特征值,可以在合理的代价下得到瑞利波频率的精确结果。众所周知,广义特征值问题的计算时间扩展到矩阵元素的数值积分和特征值的提取上,虽然矩阵的大小较小,但矩阵的密度较大,这与有限元方法不同。瑞利-里兹方法为声表面波谐振器的设计提供了另一种有效的分析方法。
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